Air Products introduces specialty gas system

Air Products has introduced its new GASGUARD Very High Flow System (VHF) to the market, for bulk specialty gas delivery and as the latest offering from the company’s Bulk Specialty Gas Systems (BSGS).

The new VHF can economically deliver 1,000 standard litres per minute or more, contingent on service and application, while for device manufacturers using high volumes of specialty gases the VHF offers improved flow, improved cost of ownership, and product dependability.

“As the demand for specialty gases to the semiconductor (IC), photovoltaic (PV) and TFT-LCD industries continues to grow, we have been able to deliver gases in the safest and most cost effective manner,” says Joe Stockunas, General Manager of Electronics Equipment and Services.

“Our new VHFS enables fab operators to lower their cost of ownership by reducing capital costs, as well as lowering square footage and exhaust flow requirements. The VHF is specifically designed to address the needs of IC, PV, and thin-film transistor liquid crystal display manufacturers.”

Air Products has leveraged its experience as the leader in providing BSGS technology to customers around the world with more bulk gas systems installed than all competitors combined.